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Information and Telecommunication Technology Center (ITTC)

BibTeX


@Article{ Nordheden00Enhancement,
author= "K. J. Nordheden and K. Upadhyaya and Y.-S. Lee and S. P. Gogineni and M.-Y. Kao",
title= "\{GaAs Etch Rate Enhancement with SF6 Addition to BC13 Plasmas}",
journal= "\{Journal of the Electrochemical Society}",
volume= "147",
number= "10",
year= "2000"
}